Abstract

The intrinsic error propagation in a technique that uses total reflection geometry for the measurement of χ⁽³⁾ is calculated. The results show how accurately the parameters should be measured to obtain the χ⁽³⁾ value with the required precision. The film thickness should be slightly less than the fundamental wavelength to reduce the χ⁽³⁾ error that propagates from other parameters.

© 1999 Optical Society of America

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