Abstract

We formed planar waveguides in LiNbO₃ and LiTaO₃ crystals by megaelectron volt He-ion implantation. The dark modes of both waveguides are measured and their refractive-index profiles are described according to the parameterized index profile reconstruction method. The extraordinary indices of both ion-implanted waveguides exhibit quite different profiles. We compare the thermal stability of barriers in ion-implanted LiNbO₃ and LiTaO₃ waveguides by annealing at different temperatures. The results show that the barrier in a LiTaO₃ planar waveguide has higher thermal stability than that in a LiNbO₃ waveguide. The experiments also show that annealing at a temperature higher than 400 °C results in recrystallization of the barrier.

© 1999 Optical Society of America

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