Abstract

We propose a new, to our knowledge, method for determining the two main critical parameters of periodic one-dimensional lamellar structures, namely, linewidths and etched depths. The method is simple and requires only two measurements for the phase of the zero-transmitted order under two orthogonal polarizations. It is inspired by the analogy between subwavelength gratings and anisotropic homogeneous thin films. The method is tested with experimental data obtained with a Mach–Zehnder interferometer. Etched depths and linewidths derived from the interferograms and electromagnetic theory are compared with scanning-electron-microscope observations.

© 1999 Optical Society of America

Full Article  |  PDF Article
Related Articles
Blazed-binary diffractive elements with periods much larger than the wavelength

Mane-Si Laure Lee, Philippe Lalanne, and Pierre Chavel
J. Opt. Soc. Am. A 17(7) 1250-1255 (2000)

Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff

Philippe Lalanne, Simion Astilean, Pierre Chavel, Edmond Cambril, and Huguette Launois
J. Opt. Soc. Am. A 16(5) 1143-1156 (1999)

High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633??nm

Simion Astilean, Philippe Lalanne, Pierre Chavel, Edmond Cambril, and Huguette Launois
Opt. Lett. 23(7) 552-554 (1998)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription