Abstract

The power spectral density of surface-relief variations on polished optical surfaces across microscopic through to macroscopic spatial scales is calculated from measurements on substrates that are being produced for the Laser Interferometer Gravitational-Wave Observatory (LIGO). These spectra give a guide to the scattering properties of the surface, which in turn critically influence the performance of LIGO. Measurements obtained by use of a full-aperture interferometer and an interference microscope with two different objectives are combined to produce one-dimensional power spectral density representations of the surfaces across spatial frequencies ranging from 0.1 to 8000 cm-1. These measurements from different instruments are in good agreement with an analytic power spectrum that varies as ν -1.5, where ν is the spatial frequency. Some anomalies in the power spectral density spectra can be related to aspects of the polishing process.

© 1999 Optical Society of America

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