Abstract

Fourier-transform profilometry (FTP) and data-dependent system profilometry (DDSP) are the two major phase-extraction methods that use a single interferogram. The difficulty in verifying surface profiles obtained by these methods is that the exact spot on an actual surface cannot be measured with two different instruments. An interferogram regeneration procedure is developed to solve this problem. The surface profile is then extracted from the regenerated interferogram by both FTP and DDSP. Comparisons of the actual surface profile with the extracted surface profiles show that both methods perform equally well in measuring the root mean square and the center line average, but only DDSP is able to reproduce the detailed surface profile of the reference surface.

© 1999 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Data-dependent systems profilometry of two-dimensional surfaces

Sudhakar M. Pandit and Duen Ping Chan
Appl. Opt. 38(31) 6540-6549 (1999)

Data-dependent-systems and Fourier-transform methods for single-interferogram analysis

S. M. Pandit and N. Jordache
Appl. Opt. 34(26) 5945-5951 (1995)

Interferogram analysis based on the data-dependent systems method for nanometrology applications

S. M. Pandit and N. Jordache
Appl. Opt. 34(29) 6695-6703 (1995)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (21)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription