Deconvolution method for two-dimensional spatial-response mapping of lithographic infrared antennas

Abstract

The spatial impulse response of antenna-coupled infrared detectors with dimensions comparable with the wavelength is obtained from a two-dimensional scan of a tightly focused CO₂-laser beam. The method uses an experimental setup with submicrometer resolution and an iterative deconvolution algorithm. The measured spatial response is compared with numerically computed near-field distributions of a dipole antenna, with good agreement.

© 1999 Optical Society of America

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