Abstract
To improve the resolution and the sensitivity of optical metrology,
we have constructed an interferometer for vacuum-ultraviolet
wavelengths. To examine the influence of the wavelength, especially
with regard to the period of the object’s structure, we chose an
apochromatic design. With reflective optics, wavelengths from 157
to 900 nm can be employed for interferometric measurements. The
benefits and also the technological problems that accompany the use of
vacuum-ultraviolet wavelengths are discussed. The design of this
interferometer and measuring results with different wavelengths are
presented.
© 1999 Optical Society of America
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