Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Ultraviolet interferometry with apochromatic reflection optics

Not Accessible

Your library or personal account may give you access

Abstract

To improve the resolution and the sensitivity of optical metrology, we have constructed an interferometer for vacuum-ultraviolet wavelengths. To examine the influence of the wavelength, especially with regard to the period of the object’s structure, we chose an apochromatic design. With reflective optics, wavelengths from 157 to 900 nm can be employed for interferometric measurements. The benefits and also the technological problems that accompany the use of vacuum-ultraviolet wavelengths are discussed. The design of this interferometer and measuring results with different wavelengths are presented.

© 1999 Optical Society of America

Full Article  |  PDF Article
More Like This
Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography

David Attwood, Gary Sommargren, Raul Beguiristain, Khanh Nguyen, Jeffrey Bokor, Natale Ceglio, Keith Jackson, Masato Koike, and James Underwood
Appl. Opt. 32(34) 7022-7031 (1993)

Interferometry with optical pickups

Franco Quercioli, Bruno Tiribilli, and Alessandro Bartoli
Opt. Lett. 24(10) 670-672 (1999)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved