Abstract

Silicon nitrides are synthesized by ion-assisted deposition with only one coating material and a nitrogen-ion-beam source. All the SiNx films are amorphous and mechanically strong. A wide range of refractive indices from 3.43 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection coating and a bandpass filter based on the multilayers of SiNx and Si are demonstrated.

© 1999 Optical Society of America

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