Abstract

The performances of a CCD detector have been evaluated in a wide spectral region, which ranges from the near IR to the soft x ray. Four different experimental setups have been used: a Czerny–Turner monochromator for the 1100–250-nm region, a normal-incidence Johnson–Onaka monochromator for the 250–30-nm region, a grazing-incidence Rowland monochromator for the 30–0.27-nm region, and a test facility with broadband filters for the 0.27–0.14-nm region. The CCD is thinned and backilluminated, with a 512 × 512 format and 24 µm × 24 µm pixels. The quantum efficiency was measured in the 1100–0.14-nm (1-eV to 9-keV) region, and the uniformity of response was in the 1100–58-nm (1–21-eV) region. Contamination effects in the vacuum UV range are also discussed.

© 1999 Optical Society of America

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