A grazing-incidence interferometer for the testing of technical
surfaces for macroscopic surface deviations is
described. Computer-generated holograms serve as beam splitters and
references for the workpieces tested. The sensitivity of the
interferometer depends on the period of the computer-generated
holograms. The method is demonstrated at a rod object of convex
profile. Using phase-stepping techniques, the grazing-incidence
interferometer provides fast measurements of the entire mantle surface
of the test sample with submicrometer precision.
© 1999 Optical Society of America
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