Abstract

We present an optical technique for measuring irregularities on a small local surface (≈λ/100). This new technique uses a narrow laser beam as a local probe. The probe beam interferes with a reference beam. We use a 90° phase delay on the reference beam to increase the sensitivity. We show that if the test surface vibrates laterally, the collected power of the interferogram encodes as amplitude modulations, on a sinusoidal temporal carrier, the local surface irregularities.

© 1998 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Heterodyne two beam Gaussian microscope interferometer

J. Mauricio Flores, Moisés Cywiak, Manuel Servín, and Lorenzo Juárez P.
Opt. Express 15(13) 8346-8359 (2007)

Three Gaussian beam interferometric profilometer applied to the characterization of an optical flat

Lorenzo Juárez P., Moisés Cywiak, Manuel ServÍn, and J. Mauricio Flores
Opt. Express 15(9) 5277-5287 (2007)

Inspection of commercial optical devices for data storage using a three Gaussian beam microscope interferometer

J. Mauricio Flores, Moisés Cywiak, Manuel Servín, and Lorenzo Juárez P.
Appl. Opt. 47(27) 4974-4980 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (22)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription