Abstract

A chromatic confocal microscope constructed with a white-light source in combination with a diffractive lens provides wavelength-to-depth coding for profile measurements of a three-dimensional sample. We acquired depth-section images nonmechanically and in parallel by incorporating a slit-scan confocal technique into the system. A system using a 100× objective obtained a depth resolution of 0.023 μm comparable with surface profilometers that operate using conventional confocal microscopy. Experimental measurements of a four-phase-level diffractive element and of a machined, metal bearing are presented.

© 1998 Optical Society of America

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