Abstract

The effects of fabrication errors on the performance of collimating finite-thickness cylindrical diffractive lenses with eight discrete levels are investigated with a rigorous boundary-element method and a scalar approach. The photolithographic fabrication errors considered are mask alignment errors, exposure errors (that result in linewidth errors), and etch-depth errors. A cylindrical Gaussian beam of TE or TM polarization is incident upon the resulting lenses. Lenses of F/4, F/2, and F/1.4 are examined. The diffraction efficiencies of the lenses with fabrication errors are generally lower than the error-free lenses with the most severe performance degradation occurring for mask misalignment and exposure errors.

© 1998 Optical Society of America

Collimating cylindrical diffractive lenses: rigorous electromagnetic analysis and scalar approximation

Elias N. Glytsis, Michael E. Harrigan, Koichi Hirayama, and Thomas K. Gaylord
Appl. Opt. 37(1) 34-43 (1998)

Scalar integral diffraction methods: unification, accuracy, and comparison with a rigorous boundary element method with application to diffractive cylindrical lenses

Jon M. Bendickson, Elias N. Glytsis, and Thomas K. Gaylord
J. Opt. Soc. Am. A 15(7) 1822-1837 (1998)

Analysis of a cylindrical microlens array with long focal depth by a rigorous boundary-element method and scalar approximations

Jia-Sheng Ye, Bi-Zhen Dong, Ben-Yuan Gu, and Shu-Tian Liu
Appl. Opt. 43(27) 5183-5192 (2004)

Finite-substrate-thickness cylindrical diffractive lenses: exact and approximate boundary-element methods

Koichi Hirayama, Ken Igarashi, Yoshio Hayashi, Elias N. Glytsis, and Thomas K. Gaylord
J. Opt. Soc. Am. A 16(6) 1294-1302 (1999)

Rigorous electromagnetic analysis of diffractive cylindrical lenses

K. Hirayama, E. N. Glytsis, T. K. Gaylord, and D. W. Wilson
J. Opt. Soc. Am. A 13(11) 2219-2231 (1996)