Abstract

We examine the possibility of using two- and three-phase systems suitable as standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence. These standards avoid propagation of errors in the angle of incidence with respect to the measured standard Ψ value. Different materials (dielectrics, metals, and semiconductors), adequate for the above purpose, are considered in different structure combinations, and their optical response are analyzed.

© 1998 Optical Society of America

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