Standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence

Stoyan C. Russev; Jean-Pierre Drolet; Daniel Ducharme

doi:10.1364/AO.37.005912

Applied Optics
Vol. 37,
Issue 25,
pp. 5912-5922
(1998)
•https://doi.org/10.1364/AO.37.005912

Standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence

Stoyan C. Russev, Jean-Pierre Drolet, and Daniel Ducharme

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Stoyan C. Russev, Jean-Pierre Drolet, and Daniel Ducharme, "Standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence," Appl. Opt. 37, 5912-5922 (1998)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We examine the possibility of using two- and three-phase systems suitable as standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence. These standards avoid propagation of errors in the angle of incidence with respect to the measured standard Ψ value. Different materials (dielectrics, metals, and semiconductors), adequate for the above purpose, are considered in different structure combinations, and their optical response are analyzed.

Full Article | PDF Article

More Like This

Sensitivity of the Ellipsometric Parameters to Angle-of-Incidence Variations

James R. Zeidler, R. B. Kohles, and N. M. Bashara
Appl. Opt. 13(7) 1591-1594 (1974)

Ellipsometric analysis for surface roughness and texture

Soe-Mie F. Nee
Appl. Opt. 27(14) 2819-2831 (1988)

Analytical determination of the complex refractive index and the incident angle of an optically isotropic substrate by ellipsometric parameters and reflectance

Chia-Wei Chen, Matthias Hartrumpf, Thomas Längle, and Jürgen Beyerer
Appl. Opt. 60(22) F33-F38 (2021)

Previous Article Next Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (14)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Material	n	k	Ψ_m (°)	φ_m (°)	Δφ_m (°)	∂Ψ/∂n (°)	∂Ψ/∂k (°)	∂φ_m/∂n (°)	∂φ_m/∂k (°)
Ag*	0.38	3.71	42.260	75.774	2.146	-7.2	-0.6	0.3	-3.4
Alb *	1.3	6.5	39.465	81.590	0.946	-4.2	-0.8	0.2	-1.2
Auc †	0.35	2.45	41.444	69.938	2.492	-10.1	-1.1	0.8	-6.3
Co*	2.24	3.98	30.863	78.020	0.794	-5.4	-2.8	1.1	-2.2
Cu†	1.11	2.42	33.942	70.859	1.340	-9.3	-3.4	2.1	-5.6
Fe*	3.30	3.60	24.318	78.655	0.594	-4.5	-3.8	1.4	-1.7
Ged *	3.90	0.77	5.927	75.912	0.308	-1.6	-7.4	3.3	-0.7
Hg†	1.603	4.729	35.964	79.017	0.942	-5.3	-1.7	0.6	-1.9
In*	1.05	6.19	40.301	81.148	1.076	-4.4	-0.7	0.2	-1.3
Ni*	2.47	3.05	26.345	76.148	0.758	-5.8	-4.2	1.9	-2.6
Nb*	3.84	3.69	22.418	79.525	0.518	-3.9	-3.8	1.3	-1.3
Pb*	2.55	4.17	29.781	78.735	0.720	-5.0	-2.8	1.1	-1.8
Pt†	1.94	4.36	33.443	78.525	0.858	-5.4	-2.2	0.8	-2.1
Rhe *	3.03	3.65	25.747	78.362	0.638	-4.8	-3.6	1.4	-1.8
Ru*	3.45	5.59	29.446	81.476	0.552	-3.7	-2.2	0.7	-1.1
Sif *	3.88	0.018	0.142	75.551	0.050	-0.04	-7.9	3.6	-0.02
Ta*	3.84	3.69	22.418	79.525	0.518	-3.9	-3.8	1.3	-1.3
Ti†	2.75	3.22	25.493	77.062	0.694	-5.3	-4.1	1.7	-2.2
V*	4.346	3.744	20.792	80.227	0.460	-3.4	-3.7	1.2	-1.1
W*	4.28	3.078	18.338	79.378	0.454	-3.3	-4.4	1.5	-1.2
Zr*	2.21	3.04	27.878	75.631	0.826	-6.3	-4.0	1.8	-3.0

Abstract

Cited By

Figures (14)

Tables (1)

Equations (10)

Applied Optics