Abstract

Congruent vaporization is a process that yields constant vapor species. Ti₂O₃ was continuously electron-beam evaporated to produce titanium oxide thin films. Rutherford backscattering spectrometry was employed to study the evolution of the composition of these films. It seems that congruent vaporization can be established in a coating plant. TiO₂ films produced by conventional reactive deposition tend to contain mixtures of titanium oxides. Increasing the transmission of TiO₂ films becomes an issue of increasing the TiO₂ component in the films by adequate reactive evaporation.

© 1998 Optical Society of America

Refractive indices of TiO₂ films produced by reactive evaporation of various titanium–oxygen phases

H. K. Pulker, G. Paesold, and E. Ritter
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Properties of TiO_x films prepared by electron- beam evaporation of titanium and titanium suboxides

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Evaluation of the oxidation of TiO₂ films during reactive evaporation of Ti₃O₅ and during exposure of the films to the atmosphere

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Properties of titanium dioxide films prepared by reactive electron-beam evaporation from various starting materials

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