Abstract

Congruent vaporization is a process that yields constant vapor species. Ti2O3 was continuously electron-beam evaporated to produce titanium oxide thin films. Rutherford backscattering spectrometry was employed to study the evolution of the composition of these films. It seems that congruent vaporization can be established in a coating plant. TiO2 films produced by conventional reactive deposition tend to contain mixtures of titanium oxides. Increasing the transmission of TiO2 films becomes an issue of increasing the TiO2 component in the films by adequate reactive evaporation.

© 1998 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Properties of TiOx films prepared by electron- beam evaporation of titanium and titanium suboxides

Friedrich Waibel, Elmar Ritter, and Robert Linsbod
Appl. Opt. 42(22) 4590-4593 (2003)

Refractive indices of TiO2 films produced by reactive evaporation of various titanium–oxygen phases

H. K. Pulker, G. Paesold, and E. Ritter
Appl. Opt. 15(12) 2986-2991 (1976)

Properties of titanium dioxide films prepared by reactive electron-beam evaporation from various starting materials

Hubert Selhofer, Elmar Ritter, and Robert Linsbod
Appl. Opt. 41(4) 756-762 (2002)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription