Abstract

We have developed a chemical vaporization machining device that has computer numerically controlled plasma, by using a pipe electrode for optical fabrications. In this device, less than approximately 1 atm of pressure, plasma is generated around the tip of a pipe electrode. During the process, a workpiece is scanned against the electrode under computer control to achieve the desired shape to be removed. A workpiece of silica glass plate is shaped by use of this device, and the removal characteristics of the device are examined. The equations to characterize numerically the shape resulting from scanning of a workpiece have been derived. The new device allows the high precision of optics from the micrometer to the nanometer level with high-speed removal. The shaped surface is sufficiently smooth to be suitable for optical use.

© 1998 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (19)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription