Abstract

We first discuss an interference microscope’s 3D response in terms of Richards and Wolf’s vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 μm and a FWHM of the depth envelope intensity at 0.25 μm. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated.

© 1998 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Nitrogen-rich silicon nitride thin films for deep-ultraviolet Mirau interferometry

F. C. Chang and G. S. Kino
Opt. Lett. 22(8) 492-494 (1997)

Correlation microscope

Stanley S. C. Chim and G. S. Kino
Opt. Lett. 15(10) 579-581 (1990)

Mirau correlation microscope

Gordon S. Kino and Stanley S. C. Chim
Appl. Opt. 29(26) 3775-3783 (1990)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (22)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription