Abstract
Values of the transmittance T
s and the phase
retardation Δ were recorded in situ at two angles during
the growth of thin films of tantalum oxide, titanium oxide, and
zirconium oxide for deposition angles θν in the range
40°–70°. Column angles for the same films were determined
ex situ from scanning electron microscopy photographs of
deposition-plane fractures. We show that the experimental column
angles are smaller than the corresponding values predicted by the
tangent-rule equation ψ = tan-1(0.5 tan
θν) and that the experimental values fit a modified
form of the equation ψ = tan-1
(E
1 tan θν) where
E
1 is less than 0.5. We also show that the
principal refractive indices are represented well by quadratic
functions of the deposition angle, for example,
n
1(θν) = A
0 +
A
2 θν
2.
© 1998 Optical Society of America
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