Abstract

The Shack–Hartmann sensor uses a microlens array and a CCD camera for wave-front measurements. To obtain wave-front measurements with high accuracy, an accurate relative alignment of both is essential. The different states of misalignment of the Shack–Hartmann sensor are divided into groups and are treated theoretically and experimentally. Their effect on the accuracy of wave-front measurements is evaluated. In addition, a practical method for proper alignment of the Shack–Hartmann sensor is proposed.

© 1998 Optical Society of America

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