Abstract

A design of a multipass optical cell is proposed. This design is based on the use of corner-cube retroreflectors arranged opposite to parallel axes, an incident beam that enters off the plane that contains the axes of the retroreflectors, and right-angle prisms to return to the cell the beam that left it after several reflections. This design allows the light beam to pass through the cell many times so that the beam paths fill the cell volume tightly and homogeneously.

© 1998 Optical Society of America

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References

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  1. V. Ya. Barash, G. S. Presnyakov, A. L. Reznikov, “A laser displacement interferometer,” USSR Invention Brevet 1,275,205 (30March1984).
  2. T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).
  3. Y. Tanimura, “Differential laser interferometer extending optical path difference,” Seimitsu Kikai 49, 1687–1691 (1983) (in Japanese).
  4. H. Haneda, “Characteristics of a Fabry–Perot interferometer with two retroreflectors and two beam splitters,” J. Opt. Soc. Am. A 9, 2167–2172 (1992).
    [CrossRef]
  5. P. R. Yoder, “Study of light deviation errors in triple mirrors and tetrahedral prisms,” J. Opt. Soc. Am. 48, 496–499 (1958).
    [CrossRef]
  6. V. V. Lyubimov, V. L. Shur, I. Sh. Etsin, “Diffraction phenomena in a two-beam laser interferometer,” Opt. Spectrosc. (USSR) 45, 204–207 (1978).
  7. G. Mana, “Diffraction effects in optical interferometers illuminated by laser sources,” Metrologia 26, 87–93 (1989).
    [CrossRef]
  8. J.-P. Monchalin, M. J. Kelly, J. E. Thomas, N. A. Kurnit, A. Szöke, F. Zernike, P. H. Lee, A. Javan, “Accurate laser wavelength measurement with a precision two-beam scanning Michelson interferometer,” Appl. Opt. 20, 736–757 (1981).
    [CrossRef] [PubMed]

1995 (1)

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

1992 (1)

1989 (1)

G. Mana, “Diffraction effects in optical interferometers illuminated by laser sources,” Metrologia 26, 87–93 (1989).
[CrossRef]

1983 (1)

Y. Tanimura, “Differential laser interferometer extending optical path difference,” Seimitsu Kikai 49, 1687–1691 (1983) (in Japanese).

1981 (1)

1978 (1)

V. V. Lyubimov, V. L. Shur, I. Sh. Etsin, “Diffraction phenomena in a two-beam laser interferometer,” Opt. Spectrosc. (USSR) 45, 204–207 (1978).

1958 (1)

Etsin, I. Sh.

V. V. Lyubimov, V. L. Shur, I. Sh. Etsin, “Diffraction phenomena in a two-beam laser interferometer,” Opt. Spectrosc. (USSR) 45, 204–207 (1978).

Haneda, H.

Hara, M.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Hara, S.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Hatsuzawa, T.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Iwasaki, H.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Javan, A.

Kelly, M. J.

Kondou, K.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Kurnit, N. A.

Lee, P. H.

Lyubimov, V. V.

V. V. Lyubimov, V. L. Shur, I. Sh. Etsin, “Diffraction phenomena in a two-beam laser interferometer,” Opt. Spectrosc. (USSR) 45, 204–207 (1978).

Mana, G.

G. Mana, “Diffraction effects in optical interferometers illuminated by laser sources,” Metrologia 26, 87–93 (1989).
[CrossRef]

Monchalin, J.-P.

Shur, V. L.

V. V. Lyubimov, V. L. Shur, I. Sh. Etsin, “Diffraction phenomena in a two-beam laser interferometer,” Opt. Spectrosc. (USSR) 45, 204–207 (1978).

Szöke, A.

Tanimura, Y.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Y. Tanimura, “Differential laser interferometer extending optical path difference,” Seimitsu Kikai 49, 1687–1691 (1983) (in Japanese).

Thomas, J. E.

Toyoda, K.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Toyonaga, S.

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

Yoder, P. R.

Zernike, F.

Appl. Opt. (1)

Bull. Natl. Res. Lab. Metrol. Tokyo (1)

T. Hatsuzawa, Y. Tanimura, K. Toyoda, M. Hara, S. Toyonaga, S. Hara, H. Iwasaki, K. Kondou, “A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEM’s,” Bull. Natl. Res. Lab. Metrol. Tokyo 44 (1), 11–14 (1995).

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Metrologia (1)

G. Mana, “Diffraction effects in optical interferometers illuminated by laser sources,” Metrologia 26, 87–93 (1989).
[CrossRef]

Opt. Spectrosc. (USSR) (1)

V. V. Lyubimov, V. L. Shur, I. Sh. Etsin, “Diffraction phenomena in a two-beam laser interferometer,” Opt. Spectrosc. (USSR) 45, 204–207 (1978).

Seimitsu Kikai (1)

Y. Tanimura, “Differential laser interferometer extending optical path difference,” Seimitsu Kikai 49, 1687–1691 (1983) (in Japanese).

Other (1)

V. Ya. Barash, G. S. Presnyakov, A. L. Reznikov, “A laser displacement interferometer,” USSR Invention Brevet 1,275,205 (30March1984).

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Figures (5)

Fig. 1
Fig. 1

Beam diagram of the MOC proposed in Ref. 1.

Fig. 2
Fig. 2

Diagram of the beam spots on the front surfaces of the CCR’s in the MOC with 16 passes of the light beam.

Fig. 3
Fig. 3

Optical layout and a diagram of the propagating beams in the cell (b = ma).

Fig. 4
Fig. 4

Diagram of the beam spots on the front surfaces of the CCR’s in the MOC with 16 passes of the light beam.

Fig. 5
Fig. 5

Diagram of the beam spots on the front surfaces of the CCR’s in the MOC with 18 passes of the light beam.

Equations (3)

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xin=xin,  yin=yin,
x1n=x1n=-1n+1(b-an-3--1n+1/2),
θ=10n1/2ε

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