Abstract

A systematic method has been proposed to evaluate the complex refractive indices and thicknesses of dispersive polymer thin films in both visible and infrared regions. The curve-fitting method has been applied to the measurement of the film thicknesses and complex refractive indices in the visible and near-infrared regions. The accuracy of the evaluated film thickness is of the order of ±0.5%. The presented method is useful for characterizing the optical properties of polymers whose refractive indices are near to those of substrates.

© 1997 Optical Society of America

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