Abstract

The method as well as an appropriate instrumentation for measuring phase changes of reflected light is described. The phase changes on samples of Au, Al, Ag, and Cr evaporated films are measured for five wavelengths (λ) from 442 to 633 nm, with respect to the phase change at the glass–air interface, where it should be zero. The measured results for the Au film are in fairly good agreement with values calculated by use of optical constants from a handbook or the complex refractive index measured by an ellipsometer. The phase changes for Al and Ag films are different from calculated values by ∼5° or a shift length of 4.4 nm at λ = 633 nm, while those of the Cr film show large shifts as high as 16° or a shift length of 9.8 nm at λ = 442 nm.

© 1997 Optical Society of America

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1990 (1)

1985 (1)

1983 (1)

1981 (1)

1972 (1)

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

1964 (1)

Bennett, J. M.

Bhushan, B.

Burow, R.

Chandler-Horowitz, D.

T. McWaid, T. Vorburger, J. F. Song, D. Chandler-Horowitz, “The effect of thin films on interferometric step height measurements,” in Interferometry: Surface Characterization and Testing, K. Creath, J. E. Greivenkamp, eds., Proc. SPIE1776, 2–13 (1992).

Chim, S. S. C.

Church, E. L.

E. L. Church, S. R. Lange, “Structure effects in optical surface metrology,” in Surface Characterization and Testing, K. Creath, ed., Proc. SPIE680, 124–130 (1986).

Clapham, P. B.

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

Doi, T.

T. Doi, K. Toyoda, Y. Tanimura, “Measurement of phase change of light on reflection,” in International Symposium on Optical Fabrication, Testing, and Surface Evaluation, J. Tsujiuchi, ed., Proc. SPIE1720, 436–443 (1992).

Downs, M. J.

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

Elssner, K. E.

Grzanna, J.

Hadley, L.

G. Hass, L. Hadley, “Optical properties of metals,” in American Institute of Physics Handbook, 3rd ed., D. E. Gray, ed. (McGraw-Hill, New York, 1972), Chap. 6, pp. 118–138.

Hass, G.

G. Hass, L. Hadley, “Optical properties of metals,” in American Institute of Physics Handbook, 3rd ed., D. E. Gray, ed. (McGraw-Hill, New York, 1972), Chap. 6, pp. 118–138.

King, R. J.

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

Kino, G. S.

Koliopoulos, C. L.

Lange, S. R.

E. L. Church, S. R. Lange, “Structure effects in optical surface metrology,” in Surface Characterization and Testing, K. Creath, ed., Proc. SPIE680, 124–130 (1986).

McWaid, T.

T. McWaid, T. Vorburger, J. F. Song, D. Chandler-Horowitz, “The effect of thin films on interferometric step height measurements,” in Interferometry: Surface Characterization and Testing, K. Creath, J. E. Greivenkamp, eds., Proc. SPIE1776, 2–13 (1992).

Merkel, K.

Raine, K. W.

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

Schwider, J.

Sommargren, G. E.

Song, J. F.

T. McWaid, T. Vorburger, J. F. Song, D. Chandler-Horowitz, “The effect of thin films on interferometric step height measurements,” in Interferometry: Surface Characterization and Testing, K. Creath, J. E. Greivenkamp, eds., Proc. SPIE1776, 2–13 (1992).

Spolaczyk, R.

Talim, S. P.

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

Tanimura, Y.

T. Doi, K. Toyoda, Y. Tanimura, “Measurement of phase change of light on reflection,” in International Symposium on Optical Fabrication, Testing, and Surface Evaluation, J. Tsujiuchi, ed., Proc. SPIE1720, 436–443 (1992).

Tolansky, S.

S. Tolansky, Multiple-Beam Interferometry of Surfaces and Films, 1st ed. (Oxford U. Press, London, 1949), pp. 96–134.

Toyoda, K.

T. Doi, K. Toyoda, Y. Tanimura, “Measurement of phase change of light on reflection,” in International Symposium on Optical Fabrication, Testing, and Surface Evaluation, J. Tsujiuchi, ed., Proc. SPIE1720, 436–443 (1992).

Vorburger, T.

T. McWaid, T. Vorburger, J. F. Song, D. Chandler-Horowitz, “The effect of thin films on interferometric step height measurements,” in Interferometry: Surface Characterization and Testing, K. Creath, J. E. Greivenkamp, eds., Proc. SPIE1776, 2–13 (1992).

Weaver, J. H.

J. H. Weaver, “Optical properties of metals,” in Handbook of Chemistry and Physics, 65th ed., R. C. Weast, ed. (CRC Press, Boca Raton, Fla., 1984), p. E–364.

Wyant, J. C.

Appl. Opt. (4)

J. Opt. Soc. Am. (1)

J. Phys. E (1)

R. J. King, M. J. Downs, P. B. Clapham, K. W. Raine, S. P. Talim, “A comparison of methods for accurate film thickness measurement,” J. Phys. E 5, 445–449 (1972).
[CrossRef]

Other (6)

G. Hass, L. Hadley, “Optical properties of metals,” in American Institute of Physics Handbook, 3rd ed., D. E. Gray, ed. (McGraw-Hill, New York, 1972), Chap. 6, pp. 118–138.

J. H. Weaver, “Optical properties of metals,” in Handbook of Chemistry and Physics, 65th ed., R. C. Weast, ed. (CRC Press, Boca Raton, Fla., 1984), p. E–364.

S. Tolansky, Multiple-Beam Interferometry of Surfaces and Films, 1st ed. (Oxford U. Press, London, 1949), pp. 96–134.

E. L. Church, S. R. Lange, “Structure effects in optical surface metrology,” in Surface Characterization and Testing, K. Creath, ed., Proc. SPIE680, 124–130 (1986).

T. Doi, K. Toyoda, Y. Tanimura, “Measurement of phase change of light on reflection,” in International Symposium on Optical Fabrication, Testing, and Surface Evaluation, J. Tsujiuchi, ed., Proc. SPIE1720, 436–443 (1992).

T. McWaid, T. Vorburger, J. F. Song, D. Chandler-Horowitz, “The effect of thin films on interferometric step height measurements,” in Interferometry: Surface Characterization and Testing, K. Creath, J. E. Greivenkamp, eds., Proc. SPIE1776, 2–13 (1992).

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