Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optimization of a beam delivery system for a short-pulse KrF laser used for material ablation

Not Accessible

Your library or personal account may give you access

Abstract

We present an optical arrangement for spatial homogenization of an UV beam carrying a short pulse (500 fs) to be used for material ablation. Conventional cylindrical fly’s eye lens homogenizers (CFELH’s) introduce unwanted interference effects into a beam caused by the high spatial coherence of short pulses. To prevent the disturbing effect of these intensity modulations, one can couple a low-loss distributed delay device to the CFELH. With the new design an intensity nonuniformity of <±5% rms can be obtained. High-resolution images of the beam profile show complete removal of the interference modulation. The pulse duration after homogenization is 12.5 ps. We performed preliminary ablation experiments in polyimide samples both by direct irradiation and by mask imaging. Uniformity and edge quality of the results are more than satisfactory, and the undesirable structure caused by interference is completely removed.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Optimization of the output beam homogeneity of short-pulse KrF amplifiers

Matthias Feuerhake, Peter Simon, Gábor Almási, Tamás Nagy, and Sándor Szatmári
Appl. Opt. 36(18) 4094-4098 (1997)

Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

Fredrik Nikolajeff, Sverker Hård, and Bernard Curtis
Appl. Opt. 36(32) 8481-8489 (1997)

Ablation of metals by ultrashort laser pulses

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling
J. Opt. Soc. Am. B 14(10) 2716-2722 (1997)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved