Abstract

Photon-induced property changes of sputter-deposited GeO2–SiO2 thin glass films were investigated. Irradiation with ArF laser pulses induced the changes in refractive index of -10% and volume of +30% in the film without ablation. A Bragg grating with a positive sinusoid wave pattern was printed upon the film by irradiation with ArF excimer laser pulses through a phase mask. The irradiated area could be quickly etched by a HF solution. The ratio of etching rate of irradiated area to unirradiated area was higher than 30. A Bragg grating with a surface relief pattern was successfully formed on the film by irradiation with excimer laser pulses followed by chemical etching. Diffraction efficiency of the gratings increased by 25 times with the etching.

© 1997 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High photosensitivity and nanometer-scale phase separation in GeO2–SiO2 glass thin films

Hideo Hosono and Junji Nishii
Opt. Lett. 24(19) 1352-1354 (1999)

Preparation of Bragg gratings in sputter-deposited GeO2–SiO2 glasses by excimer-laser irradiation

J. Nishii, H. Hosono, H. Kawazoe, and H. Yamanaka
Opt. Lett. 21(17) 1360-1362 (1996)

Photosensitive GeO2—SiO2 films for ultraviolet laser writing of channel waveguides and Bragg gratings with Cr-loaded waveguide structure

Masahide Takahashi, Akifumi Sakoh, Kentaro Ichii, Yomei Tokuda, Toshinobu Yoko, and Junji Nishii
Appl. Opt. 42(22) 4594-4598 (2003)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription