Abstract

An optical sensor for the dynamic measurement of proximity is presented. The sensor combines an extrinsic geometric transducer with interferometric encoding for high vibration sensitivity. Static calibration showed a unique variation in interference contrast over at least 60 fringes, leading to a measurement range of 20 µm and a resolution of at least 0.033µm. Dynamic excitation by using low-amplitude vibrations at 3.6 kHz showed a similar contrast variation, verifying fringe discrimination up to the sixth order. With verification of dynamic performance over all 60 fringes, the sensor should offer a low-cost approach to vibration monitoring in electrical switchgear.

© 1997 Optical Society of America

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