Abstract

Bidirectional reflectance distribution function (BRDF) measurements of a number of diffuse extreme ultraviolet (EUV) scatterers and EUV baffle materials have been performed with the Goddard EUV scatterometer. BRDF data are presented for white Spectralon SRS-99 at 121.6 nm; the data exhibit a non-Lambertian nature and a total hemispherical reflectance lower than 0.15. Data are also presented for an evaporated Cu black sample, a black Spectralon SRS-02 sample, and a Martin Optical Black sample at wavelengths of 58.4 and 121.6 nm and for angles of incidence of 15° and 45°. Overall Martin Optical Black exhibited the lowest BRDF characteristic, with a total hemispherical reflectance of the order of 0.01 and measured BRDF values as low as 2 × 10-3 sr-1.

© 1997 Optical Society of America

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