Abstract

We present a method for reproducing diffractive optical elements in quantity. The method is compatible with VLSI microfabrication techniques and involves generating a gray-scale mask. The gray-scale mask is employed in an optical aligner to expose an analog photoresist on any environmentally durable substrate, e.g., glass, quartz, semiconductor, or metal, one exposure for each diffractive optical element. After copies of the mask on the photoresist are developed, many substrates can be processed in parallel in a chemically assisted ion-beam etcher to transfer the microstructures on the analog resists simultaneously onto the surfaces of the substrates.

© 1997 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Thermal embossing of mid-infrared diffractive optical elements by use of a self-processing photopolymer master

Manuel Ornelas-Rodriguez, Sergio Calixto, Yunlong Sheng, and Colette Turck
Appl. Opt. 41(22) 4590-4595 (2002)

Micro-structuring of glassy carbon for precision glass molding of binary diffractive optical elements

Karin Prater, Julia Dukwen, Toralf Scharf, Hans Peter Herzig, Sven Plöger, and Andreas Hermerschmidt
Opt. Mater. Express 6(11) 3407-3416 (2016)

Fabrication of phase masks with variable diffraction efficiency using HEBS glass technology

Tomasz Osuch, Andrzej Kowalik, Zbigniew Jaroszewicz, and Marcin Sarzyński
Appl. Opt. 50(31) 5977-5982 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription