Abstract

The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High reflectivity in the EUV is achieved. High reflectivity and the relatively low-cost manufacturing process make high-density cast SiC a promising mirror material for EUV applications.

© 1997 Optical Society of America

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  1. J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
    [CrossRef]
  2. R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
    [CrossRef] [PubMed]
  3. G. M. Blumenstock, R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962–5963 (1994).
    [CrossRef] [PubMed]
  4. R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
    [CrossRef]
  5. T. T. Saha, D. B. Leviton, P. Glenn, “Performance of ion-figured SiC SUMER telescope mirror in VUV,” Appl. Opt. 35, 1742–1750 (1996).
    [CrossRef] [PubMed]
  6. K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.
  7. K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
    [CrossRef]
  8. S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
    [CrossRef]
  9. SSG, Inc., 150 Bear Hill Road, Waltham, Mass. 02154.
  10. J. F. Osantowski, “Reflectance and optical constants for Cer-Vit from 250 to 1050 A,” J. Opt. Soc. Am. 64, 834–838 (1974).
    [CrossRef]
  11. Morton International, 185 New Boston St., Woburn, Mass. 01801.
  12. General Optics, Inc., 554 Flinn Ave., Moorpark, Calif. 93021.
  13. Sample provided by W. J. Choyke, Department of Physics, University of Pittsburgh, Pittsburgh, Pa. 15260 through Jean Bennett, Naval Weapons Center, China Lake, Calif. 93555.

1997 (1)

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

1996 (1)

1995 (1)

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

1994 (1)

1991 (1)

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

1988 (1)

1974 (1)

Axford, W. I.

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Blumenstock, G. M.

Boucarut, R. A.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

Bowyer, S.

S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
[CrossRef]

Choyke, W. J.

S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
[CrossRef]

Curdt, W.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Fleetwood, C. M.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

Gabriel, A.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

Gabriel, A. H.

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Glenn, P.

Grewing, M.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Gum, J. S.

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

Hassler, D. M.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

Herzig, H.

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

Huber, M. C. E.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Jelinsky, P.

S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
[CrossRef]

Jordan, S. D.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Keski-Kuha, R. A. M.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

G. M. Blumenstock, R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962–5963 (1994).
[CrossRef] [PubMed]

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

Kuhne, M.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

Lemaire, P.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Leviton, D. B.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

T. T. Saha, D. B. Leviton, P. Glenn, “Performance of ion-figured SiC SUMER telescope mirror in VUV,” Appl. Opt. 35, 1742–1750 (1996).
[CrossRef] [PubMed]

Madison, T. J.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

Marsch, E.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Mrowka, S.

S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
[CrossRef]

Osantowski, J. F.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

J. F. Osantowski, “Reflectance and optical constants for Cer-Vit from 250 to 1050 A,” J. Opt. Soc. Am. 64, 834–838 (1974).
[CrossRef]

Poland, A. I.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Richter, A. K.

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Saha, T. T.

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

T. T. Saha, D. B. Leviton, P. Glenn, “Performance of ion-figured SiC SUMER telescope mirror in VUV,” Appl. Opt. 35, 1742–1750 (1996).
[CrossRef] [PubMed]

Sanger, G.

S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
[CrossRef]

Schuhle, U.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

Siegmund, O. H. W.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

Thomas, R. J.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Timothy, J. G.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Toft, A. R.

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

Vial, J.-C.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Wilhelm, K.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Adv. Space Res. (1)

J. F. Osantowski, R. A. M. Keski-Kuha, H. Herzig, A. R. Toft, J. S. Gum, C. M. Fleetwood, “Optical coating technology for the EUV,” Adv. Space Res. 11, 185–201 (1991).
[CrossRef]

Appl. Opt. (3)

J. Opt. Soc. Am. (1)

Opt. Eng. (1)

R. A. M. Keski-Kuha, J. F. Osantowski, D. B. Leviton, T. T. Saha, R. A. Boucarut, C. M. Fleetwood, T. J. Madison, “CVD silicon carbide mirrors for EUV applications,” Opt. Eng. 36, 157–161 (1997).
[CrossRef]

Sol. Phys. (1)

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, P. Lemaire, A. Gabriel, J.-C. Vial, M. Grewing, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, D. M. Hassler, O. H. W. Siegmund, “SUMER—Solar Ultraviolet Measurements of Emitted Radiation,” Sol. Phys. 162, 189–231 (1995).
[CrossRef]

Other (6)

S. Mrowka, P. Jelinsky, S. Bowyer, G. Sanger, W. J. Choyke, “Reflectivity of silicon carbide in the extreme ultraviolet,” in X-ray Instrumentation in Astronomy, J. L. Culhane ed., Proc. SPIE597, 160–164 (1985).
[CrossRef]

SSG, Inc., 150 Bear Hill Road, Waltham, Mass. 02154.

K. Wilhelm, W. I. Axford, W. Curdt, A. H. Gabriel, M. Grewing, M. C. E. Huber, S. D. Jordan, P. Lemaire, E. Marsch, A. I. Poland, A. K. Richter, R. J. Thomas, J. G. Timothy, J.-C. Vial, “The SOHO mission,” (European Space Agency, Munich, 1989), pp. 31–37.

Morton International, 185 New Boston St., Woburn, Mass. 01801.

General Optics, Inc., 554 Flinn Ave., Moorpark, Calif. 93021.

Sample provided by W. J. Choyke, Department of Physics, University of Pittsburgh, Pittsburgh, Pa. 15260 through Jean Bennett, Naval Weapons Center, China Lake, Calif. 93555.

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Figures (1)

Fig. 1
Fig. 1

Measured normal-incidence reflectance of high-density cast SiC; measured normal-incidence reflectance of CVD SiC is shown for comparison.

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