Abstract

The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High reflectivity in the EUV is achieved. High reflectivity and the relatively low-cost manufacturing process make high-density cast SiC a promising mirror material for EUV applications.

© 1997 Optical Society of America

Amorphous silicon carbide coatings for extreme ultraviolet optics

J. B. Kortright and David L. Windt
Appl. Opt. 27(14) 2841-2846 (1988)

Ion-beam-deposited boron carbide coatings for the extreme ultraviolet

G. M. Blumenstock and Ritva A. M. Keski-Kuha
Appl. Opt. 33(25) 5962-5963 (1994)

Extreme ultraviolet polarizing optics using bare and aluminum-coated silicon carbide

R. M. A. Azzam and A. M. Kan’an
Appl. Opt. 34(28) 6438-6442 (1995)

Properties of chemical-vapor-deposited silicon carbide for optics applications in severe environments

Jitendra S. Goela, Michael A. Pickering, Raymond L. Taylor, Brian W. Murray, and Arthur Lompado
Appl. Opt. 30(22) 3166-3175 (1991)

Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition

Ritva A. M. Keski-Kuha, John F. Osantowski, Albert R. Toft, and William D. Partlow
Appl. Opt. 27(8) 1499-1502 (1988)