Abstract

The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. High reflectivity in the EUV is achieved. High reflectivity and the relatively low-cost manufacturing process make high-density cast SiC a promising mirror material for EUV applications.

© 1997 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition

Ritva A. M. Keski-Kuha, John F. Osantowski, Albert R. Toft, and William D. Partlow
Appl. Opt. 27(8) 1499-1502 (1988)

Ion-beam-deposited boron carbide coatings for the extreme ultraviolet

G. M. Blumenstock and Ritva A. M. Keski-Kuha
Appl. Opt. 33(25) 5962-5963 (1994)

Amorphous silicon carbide coatings for extreme ultraviolet optics

J. B. Kortright and David L. Windt
Appl. Opt. 27(14) 2841-2846 (1988)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (1)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription