Abstract
A great amount of phase fluctuation was observed in the dual-wavelength heterodyne interferometer that we have developed. Through analyses and experiments, we found that this fluctuation was caused by polarization mixing in the interferometer. The errors originating from the polarization mixing were also found to be the first or second harmonic versus the phase change of one mode of the laser in the optical path difference and might become substantial in value. Measures that reduce the polarization mixing and improve the precision of the interferometer are given.
© 1997 Optical Society of America
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