In phase-shifting interferometry, many algorithms have been reported that suppress systematic errors caused by, e.g., nonlinear motion of the phase shifter and nonsinusoidal signal waveform. However, when a phase-shifting algorithm is designed to compensate for the systematic phase-shift errors, it becomes more susceptible to random noise and gives larger random errors in the measured phase. The susceptibility of phase-shifting algorithms to random noise is analyzed with respect to their immunity to phase-shift errors and harmonic components of the signal. It is shown that for the most common group of error-compensating algorithms for nonlinear phase shift, both random errors and the effect of high-order harmonic components of the signal cannot be minimized simultaneously. It is also shown that if an algorithm is designed to have extended immunity to nonlinear phase shift, simultaneous minimization becomes possible.
© 1997 Optical Society of AmericaFull Article | PDF Article
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