Abstract

A modal phase-reconstruction method for wave-front analysis in lateral shearing interferometry is presented. Pseudo-Zernike polynomial functions describe the differential wave fronts and are related to a Zernike polynomial description of the original wave front. We show that this reconstruction is robust for shear ratios in the range 0.15–0.50. The error propagation properties of this differential Zernike polynomial matrix-inversion method are discussed on the basis of both analysis and simulation. It is concluded that the method allows wave-front analysis with an absolute inaccuracy of 2 mλ rms for diffraction-limited wave fronts and with 1% relative inaccuracy for more strongly aberrated wave fronts.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer

G. W. R. Leibbrandt, G. Harbers, and P. J. Kunst
Appl. Opt. 35(31) 6151-6161 (1996)

Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms

Fengzhao Dai, Feng Tang, Xiangzhao Wang, Osami Sasaki, and Peng Feng
Appl. Opt. 51(21) 5028-5037 (2012)

Experimental study of a shearing interferometer concept for at-wavelength characterization of extreme-ultraviolet optics

Petra Hegeman, Xavier Christmann, Matthieu Visser, and Joseph Braat
Appl. Opt. 40(25) 4526-4533 (2001)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (5)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (45)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription