Abstract

Based on measuring one-dimensional small rotation angles by using a parallel interference pattern (PIP), a method for measuring two-dimensional (2D) small rotation angles by using two different PIP’s that are orthogonal to each other is proposed. We simultaneously measure the 2D small rotation angles Δθ and Δϕ by detecting the phases of the orthogonal PIP’s reflected by an object at two detection points. A sensitivity of 4.9 mrad/arcsec and a spatial resolution of 1.5 × 1.5 mm2 are achieved in the measurement. Theoretical analysis and experimental results show that error ɛ1 in the measurement of Δϕ is almost equal to −0.01Δθ and error ɛ2 in the measurement of Δθ is almost equal to −0.01Δϕ. For small rotation angles of less than a few tens of arcseconds, the random errors whose standard deviations are 0.6 arcsec are dominant.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Measurement of small rotation angles by using a parallel interference pattern

Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, and Takamasa Suzuki
Appl. Opt. 34(28) 6380-6388 (1995)

High accuracy, wide range, rotation angle measurement by the use of two parallel interference patterns

Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, and Takamasa Suzuki
Appl. Opt. 36(25) 6190-6195 (1997)

Improved angle interferometer based on total internal reflection

Weidong Zhou and Lilong Cai
Appl. Opt. 38(7) 1179-1185 (1999)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (61)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription