## Abstract

Reactive oxygen evaporation characteristics were determined as a function of the front-panel control parameters provided by a programmable, high-frequency sweep e-beam system. An experimental design strategy used deposition rate, beam speed, pattern, azimuthal rotation speed, and dwell time as the variables. The optimal settings for obtaining a broad thickness distribution, efficient silicon dioxide boule consumption, and minimal hafnium dioxide defect density were generated. The experimental design analysis showed the compromises involved with evaporating these oxides.

© 1996 Optical Society of America

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### Equations (11)

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(1)
$${T}_{\text{exp}}={C}_{1}{x}^{2}+{C}_{2}{y}^{2}+{C}_{3}xy,$$
(2)
$${T}_{\text{cos}}={h}^{2}/({h}^{2}+{r}^{2}){\text{cos}}^{2N}\mathrm{\Phi},$$
(3)
$$S(N)=\sum \mid {T}_{\text{exp}}-{T}_{\text{cos}}\mid .$$
(4)
$$\begin{array}{l}{N}_{s}=1.53+0.144R+0.064P-0.001D-0.31A\\ -\hspace{0.17em}0.106S+0.139{R}^{2}+0.011{P}^{2}+0.042{D}^{2}\\ +\hspace{0.17em}0.072{A}^{2}-0.051{S}^{2}-0.006PR+0.008DR\\ -\hspace{0.17em}0.114DP+0.033AR-0.024AP-0.048AD\\ -\hspace{0.17em}0.092SR-0.032SP-0.078SD-0.051SA,\end{array}$$
(5)
$$\begin{array}{l}{N}_{h}=1.59+0.193R-0.012P-0.011D+0.067A\\ +\hspace{0.17em}0.017S+0.022{R}^{2}+0.137{P}^{2}+0.072{D}^{2}\\ +\hspace{0.17em}0.037{A}^{2}-0.248{S}^{2}+0.033PR+0.051DR\\ +\hspace{0.17em}0.016DP-0.011AR+0.054AP+0.009AD\\ +\hspace{0.17em}0.008SR+0.02SP-0.055SD-0.115SA,\end{array}$$
(6)
$${N}_{s}=1.53+0.144R-0.106S-0.092SR-0.114DP,$$
(7)
$${N}_{h}=1.59+0.193R-0.115SA.$$
(8)
$$\begin{array}{l}E=3.51+0.33R+0.28P+0.22D-0.22A-0.28S\\ -\hspace{0.17em}0.17{R}^{2}-0.67{P}^{2}-0.58{D}^{2}+0.41{A}^{2}-0.67{S}^{2}\\ -\hspace{0.17em}0.06PR+0.06DR-0.06DP+0.06AR\\ -\hspace{0.17em}0.06AP+0.07AD-0.06SR+0.06SP\\ -\hspace{0.17em}0.06SD-0.06SA.\end{array}$$
(9)
$$E=3.51+0.33R+0.28P-0.28S-0.67{P}^{2}-0.67{S}^{2}.$$
(10)
$$\begin{array}{l}\mathrm{\rho}=5.5-4.07R+2.03P-1.54D-0.13A+2.86S\\ +\hspace{0.17em}1.34{R}^{2}+2.88{P}^{2}-1.67{D}^{2}-0.12{A}^{2}+0.75{S}^{2}\\ -\hspace{0.17em}0.98PR+0.31DR-0.93AR-1.63SR\\ +\hspace{0.17em}0.41DP-2.55AP+5.41SP+0.79SD\\ -\hspace{0.17em}2.52AD-1.42SA.\end{array}$$
(11)
$$\mathrm{\rho}=5.5-4.07R+2.03P+2.86S-2.52DA-2.55AP+5.41SP,$$