Indium tin oxide (ITO) films were deposited onto automobile glass substrates with dc reactive sputtering and ion-assisted e-beam-gun evaporation processes. The ITO-coated glass samples were then strengthened through a surface compression strengthening process that included heating the glass at 650 °C for 5 min and rapidly cooling the exterior of the hot glass with air jets. The deterioration of electrical and optical properties of the ITO films on automobile safety glass was found during the heating stage of the strengthening process. When a layer of SiO2 barrier was added, the property deterioration could be significantly reduced. The most effective barrier thickness was found near 60 nm, which resulted in no appreciable property loss.
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