Abstract

Numerous characterizations were performed on 120-nm thick evaporated SiO2 layers in order to understand how their features change as a function of deposition conditions and time. Density decreases with increasing deposition pressure. It governs all the layer properties (refractive index, hardness, and stress). In situ stress measurements show that stress can be divided into intrinsic and water-induced components, respectively linked to local density (outside the pores) and porosity. Intrinsic stress increase with decreasing pressure is explained by a diminution of the Si-O-Si bond angle (IR measurements). Long-term evolution is characterized by stress relaxation related to Si-O-Si strained bond hydrolysis.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Ultralow refractive index optical films with enhanced mechanical performance obtained by hybrid glancing angle deposition

W. Trottier-Lapointe, O. Zabeida, T. Schmitt, and L. Martinu
Appl. Opt. 55(31) 8796-8805 (2016)

Long-term time dependence of internal stress in lanthanum titanium oxide (H4) optical thin films

Masashi Takegami, Ryota Nakano, and Hiroshi Murotani
Appl. Opt. 56(4) C96-C99 (2017)

Stress analysis of ZrO2?SiO2 multilayers deposited on different substrates with different thickness periods

Shuying Shao, Jianda Shao, Hongbo He, and Zhengxiu Fan
Opt. Lett. 30(16) 2119-2121 (2005)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription