Abstract

To meet the requirements of comprehensively characterizing the morphology of thin films and substrates, a suitable combination of different measuring techniques should be chosen, i.e., a nonoptical surface profile measurement should be used together with optical analysis. It is demonstrated on selected examples of fluoride and oxide films that the use of atomic force microscopy and light scattering fulfills the demand of appropriate quantitative characterization over a sufficiently large range of bandwidths.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Measurements of light scattering from glass substrates by total integrated scattering

Haihong Hou, Kui Yi, Shuzhen Shang, Jianda Shao, and Zhengxiu Fan
Appl. Opt. 44(29) 6163-6166 (2005)

Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy

Victor E. Asadchikov, Angela Duparré, Stefan Jakobs, Albert Yu. Karabekov, Igor V. Kozhevnikov, and Yury S. Krivonosov
Appl. Opt. 38(4) 684-691 (1999)

Interfacial roughness and related scatter in ultraviolet optical coatings: a systematic experimental approach

Stefan Jakobs, Angela Duparré, and Horst Truckenbrodt
Appl. Opt. 37(7) 1180-1193 (1998)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription