Abstract

Two methods and an experimental setup for the measurement of spacing of diffraction gratings have been developed. These methods depend on interferometric measurements at different wavelengths of the angles of diffraction beams from the grating to be measured. A lower limit for the measured spacing is the half-wavelength of laser radiation. The results of spacing measurements of approximately 0.28, 0.39, and 0.50 μm are presented.

© 1996 Optical Society of America

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References

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  1. J. R. McNeil, “Linewidth measurement of gratings on photomasks: a simple technique,” Appl. Opt. 31, 1377–1384 (1992).
    [CrossRef] [PubMed]
  2. H. P. Kleinknecht, H. Meyer, “Linewidth measurement on IC masks and wafers by grating test patterns,” Appl. Opt. 19, 525–533 (1980).
    [CrossRef] [PubMed]
  3. V. M. Veseliev, V. D. Lizunov, S. A. Zagarskii, “Laser diffractometric measuring system for short length measurements”, Izmer. Tekh. March, pp. 19–21 (1990), in Russian.
  4. L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).
  5. Le Systéme International d’Unités (SI) (Bureau International des Poids et Mesures, Sèvres, France, 1991), in French and in English.

1994 (1)

L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).

1992 (1)

1990 (1)

V. M. Veseliev, V. D. Lizunov, S. A. Zagarskii, “Laser diffractometric measuring system for short length measurements”, Izmer. Tekh. March, pp. 19–21 (1990), in Russian.

1980 (1)

Kleinknecht, H. P.

Korotkov, V. I.

L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).

Lizunov, V. D.

V. M. Veseliev, V. D. Lizunov, S. A. Zagarskii, “Laser diffractometric measuring system for short length measurements”, Izmer. Tekh. March, pp. 19–21 (1990), in Russian.

McNeil, J. R.

Meyer, H.

Pulkin, S. A.

L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).

Veseliev, V. M.

V. M. Veseliev, V. D. Lizunov, S. A. Zagarskii, “Laser diffractometric measuring system for short length measurements”, Izmer. Tekh. March, pp. 19–21 (1990), in Russian.

Vitushkin, L. F.

L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).

Zagarskii, S. A.

V. M. Veseliev, V. D. Lizunov, S. A. Zagarskii, “Laser diffractometric measuring system for short length measurements”, Izmer. Tekh. March, pp. 19–21 (1990), in Russian.

Zeilikovich, L. S.

L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).

Appl. Opt. (2)

Izmer. Tekh. March (1)

V. M. Veseliev, V. D. Lizunov, S. A. Zagarskii, “Laser diffractometric measuring system for short length measurements”, Izmer. Tekh. March, pp. 19–21 (1990), in Russian.

Opt. Spectrosc. (1)

L. F. Vitushkin, L. S. Zeilikovich, V. I. Korotkov, S. A. Pulkin, “High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings,” Opt. Spectrosc. 77, 129–135 (1994).

Other (1)

Le Systéme International d’Unités (SI) (Bureau International des Poids et Mesures, Sèvres, France, 1991), in French and in English.

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Figures (3)

Fig. 1
Fig. 1

Optical layout of the laser interferometric diffractometer.

Fig. 2
Fig. 2

Beam diagram of the laser interferometric diffractometer for the two-wavelength method.

Fig. 3
Fig. 3

Beam diagram of the laser interferometric diffractometer for the three-wavelength method.

Equations (19)

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2 D x sin α = λ 0 ,
D x ( sin α + sin φ ) = λ 1 ,
Φ = α φ,
D x 2 = λ 0 2 4 + 1 sin 2 Φ [ λ 0 2 ( 1 + cos Φ ) λ 1 ] 2 .
p 0 p 1 = sin Ψ λ 0 λ 1 sin Φ .
D r sin Ψ = m λ 0 .
sin Ψ = m λ 0 D r .
D x 2 = λ 0 2 4 + 1 γ 2 { λ 0 2 [ 1 + ( 1 γ 2 ) 1 / 2 ] λ 1 } 2 ,
γ = p 0 p 1 λ 1 m D r .
D x ( sin α + sin φ 1 ) = λ 1 ,
D x ( sin α + sin φ 2 ) = λ 2 .
Φ 1 = α φ 1 ,
Φ 2 = α φ 2 .
D x ( 1 λ 0 2 4 D x 2 ) 1 / 2 = 1 sin Φ i × ( λ i λ 0 2 λ 0 2 ( 1 sin 2 Φ i ) 1 / 2 ) ,
p 1 p 2 = sin Φ 2 λ 2 λ 1 sin Φ 1 .
D x 2 = λ 0 2 4 + 1 ξ 2 b 2 ( λ 1 λ 0 2 λ 0 2 ( 1 ξ 2 + b 2 ) 1 / 2 ) 2 ,
ξ = p 2 p 1 λ 1 λ 2 ,
a = 2 λ 0 [ ξ ( λ 2 λ 0 2 ) ( λ 1 λ 0 2 ) ] ,
b = a 2 + ξ 2 1 2 a .

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