Abstract

A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed.

© 1996 Optical Society of America

Full Article  |  PDF Article
Related Articles
Distributed-index planar microlens

M. Oikawa and K. Iga
Appl. Opt. 21(6) 1052-1056 (1982)

Monolithic integration of microlens arrays and fiber holder arrays in poly(methyl methacrylate) with fiber self-centering

Maria Kufner, Michael Frank, Stefan Kufner, and Pierre Chavel
Opt. Lett. 20(3) 276-278 (1995)

Microlenses in polymethyl methacrylate with high relative aperture

Michael Frank, Maria Kufner, Stefan Kufner, and Markus Testorf
Appl. Opt. 30(19) 2666-2667 (1991)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription