Abstract

We describe calculations of the sensitivity of CCD’s to soft x rays incident at grazing angles. Soft-x-ray spectrometers based on a Rowland-circle geometry have a focal plane and hence detector surface at grazing incidence to the soft x rays. We model the penetration of the grazing-incidence soft x rays to the sensitive region of the CCD and predict the charge-collection efficiency as a function of wavelength. The results show significant advantages over microchannel plate intensified detection.

© 1996 Optical Society of America

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