Abstract

Polarization of specular reflection and near-specular scattering (NSS) by a randomly rough surface is investigated by the use of a Mueller matrix formulation. The collective effect by a rough surface on the average specular field results in reflectance loss and polarization, which can be explained by an effective medium theory. Effects of random NSS can be represented by a scattering matrix that is partially coherent and polarized. The incoherent and unpolarized part of scattering causes depolarization, and the coherent and polarized parts of scattering change the apparent polarization properties of specular reflection. Results of a simulation and least-squares fit of ellipsometric data to the models including the NSS effect, for a black anodized aluminum sample, are presented. Simultaneous least-squares fits for both ellipsometric data and reflectance data at multiple angles of incidence at three different wavelengths gave approximately the same rms roughness, which agrees with the profilometric values reported previously.

© 1996 Optical Society of America

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