Abstract

An analysis procedure for evaluating the refractive index and the thickness of 5−10-μm-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in Ψ and Δ with respect to the refractive index and the thickness of the films are also discussed.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Numerical algorithm for spectroscopic ellipsometry of thick transparent films

Salvador Bosch, Julio Pérez, and Adolf Canillas
Appl. Opt. 37(7) 1177-1179 (1998)

Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

Denis Pristinski, Veronika Kozlovskaya, and Svetlana A. Sukhishvili
J. Opt. Soc. Am. A 23(10) 2639-2644 (2006)

Simultaneous and Independent Determination of the Refractive Index and the Thickness of Thin Films by Ellipsometry*

K. Vedam, R. Rai, F. Lukes, and R. Srinivasan
J. Opt. Soc. Am. 58(4) 526-532 (1968)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription