Abstract

A statistical model that describes the analog measurement of a fluctuating light intensity that arises from a non-Gaussian scattering process is developed. The higher-order statistical moments are derived for a p-i-n diode receiver model and gamma-distributed intensity fluctuations. Criteria for the accurate measurement of the scattering fluctuations are found, and these are used to analyze data derived from an on-line scatterometer system. Implications for future on-line measurement technology are discussed.

© 1995 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Signal processing analog of phase screen scattering

E. Jakeman and K. D. Ridley
J. Opt. Soc. Am. A 15(5) 1149-1159 (1998)

Higher-order statistics of laser-irradiance fluctuations due to turbulence

Arun K. Majumdar
J. Opt. Soc. Am. A 1(11) 1067-1074 (1984)

Enhanced observation of number fluctuations by use of structured light

P. R. Smith and R. Naimimohasses
Opt. Lett. 22(14) 1110-1112 (1997)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (40)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription