Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Gray-scale masks for diffractive-optics fabrication: I. Commercial slide imagers

Not Accessible

Your library or personal account may give you access

Abstract

Fabrication of diffractive optics with binary masks requires multiple photolithographic processes to produce high-efficiency elements. Alignment or etching errors at any stage of fabrication decrease the efficiency of the element. We developed an easily accessible procedure that reduces fabrication complexity and costs by using a single gray-scale mask. The gray-scale patterns are generated by commercial slide imagers and are then photoreduced onto low-contrast film plates. Multiple-level or continuous relief structures (kinoforms) may be constructed by use of the photoreduced gray-scale patterns as lithographic masks. Diffractive-optic lenses and blazed gratings were fabricated in photoresist with this procedure. First-order diffraction efficiencies as high as 85% were measured for the blazed gratings. The advantages and the limitations of this technique are discussed.

© 1995 Optical Society of America

Full Article  |  PDF Article
More Like This
Gray-scale masks for diffractive-optics fabrication: II. Spatially filtered halftone screens

Donald C. O’Shea and Willie S. Rockward
Appl. Opt. 34(32) 7518-7526 (1995)

Fidelity of PostScript-generated masks for diffractive optics fabrication

Thomas J. Suleski and Donald C. O’Shea
Appl. Opt. 34(4) 627-635 (1995)

Photoresist characterization and linearization procedure for the gray-scale fabrication of diffractive optical elements

Marion LeCompte, Xiang Gao, and Dennis W. Prather
Appl. Opt. 40(32) 5921-5927 (2001)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved