Abstract

An iterative algorithm has been developed that takes starting values derived by an envelope method but then minimizes the influence of the envelopes and emphasizes the actual measured data. This combination avoids the difficulties inherent in the accurate drawing of the envelopes and makes it possible to extract the thickness and the optical constants of semiconducting and dielectric films over a wide spectral region, including regions of high absorption.

© 1995 Optical Society of America

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