Abstract

Multilayer and gold coatings were applied to replicas of the 3600-line/mm ruled grating that was developed for the Naval Research Laboratory S082A spectroheliograph that was flown on the Skylab spacecraft. The Mo–Si multilayer coating had a peak normal-incidence reflectance of 50% at a wavelength of 136 Å. The normal-incidence efficiency of the multilayer-coated grating was measured by the use of synchrotron radiation and was compared with the efficiency of the gold-coated replica grating in the 115–340-Å wavelength region. The peak efficiency of the multilayer grating was 1.3% in the 133–137-Å region and was a factor of 65 higher than the efficiency of the gold grating. The multilayer and gold coated gratings, as well as an uncoated replica grating substrate, were characterized by the use of a scanning probe microscope. The rms microroughness of the uncoated and multilayer-coated gratings was 10 Å, and the microroughness of the gold grating was 16 Å.

© 1995 Optical Society of America

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