Abstract

The far-UV reflectance of thin unoxidized aluminum films prepared and maintained in ultra-high-vacuum conditions was measured versus the angle of incidence, and the complex refractive index was obtained from those measurements on several wavelengths from 82.6 to 113.5 nm. Measurements were made on two perpendicular planes of incidence to deal with the unknown of the polarization state of the radiation beam. The surface roughness was characterized by atomic force microscopy. The refractive index is obtained for the first time, to our knowledge, from direct optical measurements in this spectral range. Current results match well the former values in the literature that were calculated through the Kramers–Kronig analysis by using in the above interval reflectances estimated from electron-energy-loss spectra and from optical measurements on surfaces of unstated roughness.

© 1995 Optical Society of America

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