Abstract

A method for fabricating refractive micro-optical elements by structuring poly(methyl methacrylate) layers is presented. With this flexible and simple method a surface growth of several micrometers can be achieved. For smooth surface reliefs a nearly linear response of the phase growth to the UV intensity can be achieved over a range of 8π. The edge steepness depends on the maximum height and can reach values as high as 2π above 4 μm. We describe the fabrication process, establish a mathematical model of the surface growth, and also present as experimental results some components fabricated by this method.

© 1995 Optical Society of America

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