Abstract

The roughnesses of five supersmooth dielectric films of Si3N4, TiO2, HfO2, Ta2O5, and Al2O3 prepared by an ion-beam-sputtering technique were measured with a commercial Talystep mechanical profiler and a sensitive Leica WYKO SPM30 scanning force microscope (SFM) to determine how much roughness the films added to the ~1-Å-rms roughness fused-silica substrates on which they were deposited. In all cases the increase in roughness for the three-quarter-wave optical thickness films was a small fraction of an angstrom. SFM measurements showed that the topography of the Ta2O5 and Al2O3 films was less random than that of the other film materials and the substrates.

© 1995 Optical Society of America

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References

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  1. J. M. Bennett, J. H. Dancy, “Stylus profiling instrument for measuring statistical properties of smooth optical surfaces,” Appl. Opt. 20, 1785–1802 (1981).
    [Crossref] [PubMed]
  2. J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D. C., 1989).
  3. WYKO Corporation, 2650 East Elvira Road, Tucson, Ariz. 85706.
  4. J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

1994 (1)

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

1981 (1)

Balter, T. L.

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

Bennett, J. M.

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

J. M. Bennett, J. H. Dancy, “Stylus profiling instrument for measuring statistical properties of smooth optical surfaces,” Appl. Opt. 20, 1785–1802 (1981).
[Crossref] [PubMed]

J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D. C., 1989).

Dancy, J. H.

Hobbs, D. T.

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

Jahanmir, J.

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

Mattsson, L.

J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D. C., 1989).

Podlesny, J. C.

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

Appl. Opt. (2)

J. M. Bennett, J. H. Dancy, “Stylus profiling instrument for measuring statistical properties of smooth optical surfaces,” Appl. Opt. 20, 1785–1802 (1981).
[Crossref] [PubMed]

J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, D. T. Hobbs, “Scanning force microscope as a tool for studying optical surfaces,” Appl. Opt. 33, 213–230 (1994).

Other (2)

J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D. C., 1989).

WYKO Corporation, 2650 East Elvira Road, Tucson, Ariz. 85706.

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Figures (7)

Fig. 1
Fig. 1

Talystep surface profiles of (a) a Si3N4 film of 0.6-Å-rms roughness, (b) the fused-silica substrate adjacent to the Si3N4 film, also of 0.6-Å-rms roughness, and (c) the profile equivalent of the instrumental noise with the stylus stationary, 0.5-Å-rms roughness.

Fig. 2
Fig. 2

A 3D SFM image of the fused-silica substrate of 1.0-Å-rms roughness adjacent to the Si3N4 film; the area is 2 μm × 2 μm.

Fig. 3
Fig. 3

A 3D SFM image of a Si3N4 film of 1.1-Å-rms roughness over a 2 μm × 2 μm area.

Fig. 4
Fig. 4

A 3D SFM image of a TiO2 film of 1.5-Å-rms roughness over a 2 μm × 2 μm area.

Fig. 5
Fig. 5

A 3D SFM image of a HfO2 film of 0.9-Å-rms roughness over a 2 μm × 2 μm area.

Fig. 6
Fig. 6

A 3D SFM image of a Ta2O5 film of 1.3-Å-rms roughness over a 2 μm × 2 μm area.

Fig. 7
Fig. 7

A 3D SFM image of an Al2O3 film of 0.8-Å-rms roughness over a 2 μm × 2 μm area.

Tables (1)

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Table 1 Films, Physical Thicknesses, and rms Roughnesses as Measured with a SFM and Talystep Mechanical Profilera

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