Dark-field imaging is attained by use of a λ/4 plate and an analyzer in a confocal scanning microscope. This dark-field microscope detects only the edge-diffracted wave whose polarization is different from that of the incident beam. The fact that images of photoresist patterns taken by the microscope show only the edges of the patterns confirms the dark-field nature of the imaging.
© 1994 Optical Society of America
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