Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

Not Accessible

Your library or personal account may give you access

Abstract

We have built an adaptive system capable of detecting submicrometer defects in periodic structures by using real-time holography in photorefractive crystals. We summarize the design and optimization of the defect-enhancement system. We present representative results of 0.2- to 0.5-μm diameter defect detection on two different periodic substrates: chrome-on-glass masks and patterned silicon wafers. On patterned silicon we detect 94% of the 0.5-μm diameter defects with three false positives, while inspecting an area greater than 1 mm2 in 20 s or less. The throughput on the glass masks is somewhat less. To the best of our knowledge, these defects have an area 100 times smaller than those previously detected with any real-time holographic technique.

© 1994 Optical Society of America

Full Article  |  PDF Article
More Like This
Submicrometer defect enhancement in periodic structures by using photorefractive holography

Craig Uhrich and Lambertus Hesselink
Opt. Lett. 17(15) 1087-1089 (1992)

Optical surface inspection using real-time Fourier transform holography in photorefractives

Craig Uhrich and Lambertus Hesselink
Appl. Opt. 27(21) 4497-4503 (1988)

Adaptive defect and pattern detection in amplitude and phase structures via photorefractive four-wave mixing

George Nehmetallah, Partha Banerjee, and Jed Khoury
Appl. Opt. 54(32) 9622-9629 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (17)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (24)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved